SR Particle Improvement Program EnglishSR Particle improvement1、Main improvement points1 All EQ use efficient FFU；2 All axis of motion above the stage should be install the dust cover3 Decrease the nu

Main improvement points

Use efficient FFU in all EQs.

Install dust covers on all axes of motion above the stage.

Decrease the number of tank chains on the axes of motion above the stage to control dust.

Optimize the electrical line setting in the EQ.

Develop a cleaning plan for EQs that includes periodic and pre-use cleaning.

Optimization content

Use efficient FFUs in all EQs. The EQs, including loading, dispensing, and unloading, should be equipped with efficient FFUs, as shown in the figure below. The airflow will remove dust through the windows around the EQ to improve air cleanliness.

Install dust covers on all axes of motion above the stage. Dust covers should be installed around all axes of motion, as shown in the figure below, to prevent dust from lead screws and guide rails from falling onto the stage.

Decrease the number of tank chains on the axes of motion above the stage to control dust. All electrical lines on the axes of motion are made by IGUS and encapsulated by non-dust cloth to reduce dust, as shown in the figure below.

Optimize the electrical line setting in the EQ. Set the electrical lines under the baseboard as much as possible and place the lines in the proximity of the up rack to reduce dust.

Develop a cleaning plan for EQs that includes periodic and pre-use cleaning. Clean the stage surface every day and the inside of the EQ every week. Make a cleaning plan based on the actual conditions