ITO Glass Cleaning and Surface Modification for Improved Film Formation

Before device fabrication, clean the ITO glass with a dust-free cloth dipped in detergent, and then clean it in deionized water, acetone, and isopropanol by ultrasound for 15 minutes each. The ITO glass is then transferred to an oven for drying for 2 hours and blown dry with nitrogen gas to ensure surface cleanliness. The ITO glass is then exposed to ultraviolet radiation for 15 minutes to increase hydrophilicity and improve film formation.