国内MEMS技术的发展取得了长足的进步。目前国内已经开展了包括MEMS惯性传感器、MEMS微波器件、MEMS光学器件、MEMS射频器件等多个领域的研究。其中MEMS惯性传感器是应用最为广泛的一种MEMS器件主要应用于惯性导航、飞行控制、车辆导航、智能手机等领域。国内研究机构和企业在MEMS惯性传感器的研究方面取得了一些进展如北航研制的微惯性测量单元MEMS、华为研制的惯性测量单元MEMS等产品已经

The development of MEMS technology has made significant progress in foreign countries. Currently, research in multiple fields, including MEMS inertial sensors, MEMS microwave devices, MEMS optical devices, and MEMS RF devices, has been conducted. MEMS inertial sensors are the most widely applied MEMS devices, mainly used in inertial navigation, flight control, vehicle navigation, smartphones, and other fields. Foreign research institutions and enterprises have made significant progress in the research of MEMS inertial sensors. For example, products such as the ADXL series of inertial sensors from Analog Devices and the MPU series of inertial sensors from InvenSense have been widely used in the international market.

The use of quaternion-based attitude estimation methods has become a hot topic in research in fields such as aerospace, robotics, and virtual reality. Quaternion-based attitude estimation methods have the advantages of being concise and efficient. Foreign research institutions and universities have made significant progress in the development of quaternion-based attitude estimation methods. For example, the University of California, Berkeley, has proposed a quaternion-based complementary filter for attitude estimation.

Filtering is a common method for processing sensor measurement data to reduce noise and error and improve measurement accuracy. Complementary filters are a widely used sensor fusion algorithm that combines the data from multiple sensors to improve system accuracy and robustness. Complementary filters have also been widely used in the data fusion of MEMS inertial sensors. Foreign research institutions and universities have made significant progress in the development of complementary filters for MEMS inertial sensor data fusion. For example, the University of Illinois at Urbana-Champaign has proposed a complementary filter-based MEMS inertial sensor attitude estimation method.

In summary, foreign research has made significant progress in MEMS technology, quaternion-based attitude estimation, and complementary filters. However, further research and development are still required to meet the demands of the domestic and international markets. In general, foreign research has focused on the application of MEMS inertial sensors in attitude estimation and filtering, and there is still significant potential for future development. With the continuous advancement of technology and the expansion of applications, MEMS sensors will play an increasingly important role in more fields