这篇科技文本的专业术语有哪些怎么用英文翻译这些专业术语；另外帮我翻译这篇完整的文章：1引言熔石英玻璃作为典型的宽禁带介质材料广泛应用于制造光栅、真空窗口、屏蔽片和透镜等器件。为了实现高精度熔石英玻璃的批量制造国内外普遍采用磨削成形→精密研磨→超精密抛光的工艺流程。其中抛光加工作为光学材料精密超精密制造工序的最后一个步骤对元件的加工质量和表面完整性有着重要作用。传统的化学机械抛光技术通过化学能和机械

专业术语：

1. 熔石英玻璃 - Fused Silica Glass
2. 宽禁带介质材料 - Wide Bandgap Semiconductor Material
3. 光栅 - Grating
4. 真空窗口 - Vacuum Window
5. 屏蔽片 - Shielding Plate
6. 透镜 - Lens
7. 磨削成形 - Grinding Shaping
8. 精密研磨 - Precision Grinding
9. 超精密抛光 - Ultra-Precision Polishing
10. 化学机械抛光技术 - Chemical Mechanical Polishing (CMP) Technology
11. 磁辅助抛光技术 - Magneto-Rheological Finishing (MRF) Technology
12. 磁流变 - Magnetorheological Fluid (MRF)
13. 磁流体 - Magnetic Fluid (MF)
14. 磁性复合流体 - Magnetic Compound Fluid (MCF)
15. 粗糙度 - Roughness
16. 材料去除率 - Material Removal Rate (MRR)
17. 空间磁感应强度 - Spatial Magnetic Induction Intensity

翻译： Introduction As a typical wide bandgap semiconductor material, fused silica glass is widely used in the production of gratings, vacuum windows, shielding plates, lenses, and other devices. In order to achieve high-precision batch production of fused silica glass, a process flow of "grinding shaping → precision grinding → ultra-precision polishing" is generally used both domestically and internationally. Among them, polishing is the final step in the precision/ultra-precision manufacturing process of optical materials and plays an important role in the processing quality and surface integrity of components. Traditional chemical mechanical polishing technology obtains smooth and flat surfaces through the coupling of chemical and mechanical energy. However, due to the normal cutting action of abrasive grains during the machining process, mechanical defects such as scratches, micro-cracks or pits are easily generated below the surface, and these defects are prone to induce material melting and explosive damage under strong laser irradiation. In recent years, magneto-rheological finishing technology, which uses fluid dynamic pressure and shear to remove materials, has received widespread attention from scholars both domestically and abroad, and has gradually developed into a method for processing "near-zero" defect surfaces of strong light components. According to the different magnetic microparticles (micron-sized iron powder or nano-sized ferric oxide) in the polishing fluid, magneto-rheological finishing technology is mainly divided into three types: magnetorheological fluid (MRF), magnetic fluid (MF), and magnetic compound fluid (MCF) polishing. Magneto-rheological finishing uses magnetic microparticles, non-magnetic abrasive grains, cellulose, and deionized water to form a viscous semi-solid flexible polishing head, and the abrasive grains beneath the polishing head come into contact with the workpiece and achieve low-damage, high-precision polishing through relative motion and micro-cutting. Shi et al. analyzed the feasibility of elastic MRF polishing based on the theory of elastic-plastic deformation, and achieved chemical-dominant elastic MRF polishing of large-diameter fused silica glass by changing the composition of the magnetic rheological fluid and polishing parameters, ultimately obtaining a super-smooth surface with a roughness Ra of 0.167 nm. Jiang et al. compared the differences in the normal polishing force, tangential polishing force, material removal rate, and surface roughness of the workpiece during traditional MCF polishing and ultrasound-assisted MCF polishing, and found that ultrasound-assisted polishing is beneficial to improving the material removal rate and surface smoothness of the workpiece. Guo et al. showed that the material removal rate of BK7 glass during end-face MCF polishing is positively correlated with the carrier disc speed and negatively correlated with the polishing gap, and established a material removal rate model related to tangential and normal forces on the workpiece. The above-mentioned research has explored the material removal mechanism and surface quality formation mechanism of magneto-rheological finishing technology from both theoretical and experimental perspectives, and promoted the application of magneto-rheological processing technology in the field of optical manufacturing. In this article, different polishing gaps and different volumes of iron powder-based polishing fluids are used to perform magneto-rheological finishing on fused silica components for different periods of time, and the material removal rate, surface roughness, and transmittance of fused silica are analyzed and evaluated. Combined with simulation calculations of spatial magnetic induction intensity, the influence of spatial magnetic induction intensity and iron powder volume ratio on material removal efficiency and surface quality is clarified, and a polishing process of "small polishing gap + high iron powder ratio polishing fluid → large polishing gap + low iron powder ratio polishing fluid" is proposed, providing a theoretical basis and technical support for efficient and low-defect processing of strong laser components. 2 Experiment 2.1 Sample Preparation In this experiment, a circular polishing machine built in-house is used for magneto-rheological finishing of fused silica glass components. The polishing equipment is shown in Figure 1. A horizontal spindle drives a ring-shaped magnet with a magnetic flux density of 0.4 T made of neodymium-iron-boron (Nd-Fe-B) to rotate at a speed of nt, forming a dynamic spatial magnetic field. A ring-shaped polylactic acid (PLA) baffle is installed on both ends of the magnet, with the same outer diameter of 40 mm, inner diameter of 25 mm, and thickness of 8 mm and 4 mm, respectively. The ring-shaped baffle and ring-shaped magnet together form the polishing wheel, and there is a polishing gap δ between the polishing wheel and the workpiece below it. A 40 mm × 40 mm × 5 mm fused silica glass is used as the processing object. Before polishing, the workpiece is double-sided ground with W5-W10 silicon carbide, and the initial surface roughness Ra is 0.2-0.25 μm, and the depth of sub-surface cracks is within 4.5 μm