An analysis of the coupling factors of positioning error in the feed system is carried out, and an overall process for decoupling and compensating positioning error is proposed. The thermal error and geometric error in positioning error are separated using a linear fitting method, and the geometric error is compensated using the pitch error compensation function of the SIEMENS 828D numerical control system. The geometric error is reduced from -1.4μm~1.6μm to -0.05μm~0.1μm.

翻译分析了进给系统中定位误差的耦合因素提出了定位误差解耦及补偿的整体流程利用一次线性拟合的方法分离出定位误差中的热误差和几何误差利用SIEMENS 828D数控系统的螺距误差补偿功能实现了对几何误差的补偿将几何误差由-14μm~16μm减小至-005μm~01μm。

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