检查语法错误：Detailed chemical states of Si element before and after silane grafted further demonstrates that the silane was successfully modified onto the surface Both surfaces have Si-Si from the silicon

Detailed chemical states of the Si element before and after silane grafting further demonstrate that the silane was successfully modified onto the surface. Both surfaces have Si-Si from the silicon wafer and Si(-O)4 from the SiO2 layer. Alternatively, the silane-modified surface containing Si is from the Si(-O)3 which formed from the condensation of the silane and hydroxyl.